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Chemical vapor deposition furnace
Chemical Vapor Desposition Furnace
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details

Use

The furnace mainly used for making silicon carbide or carbon-carbon surface coating of graphite or carbon-carbon material.

Main configuration:

1.Vertical structure, furnace shell is made of corrosion-resistant material.

2. Particular gas-in and out configuration contributes to the good temperature uniformity in heating field.

3. Accurate control of atmosphere, vacuum system equipped with the filter, exhaust gas treatment is optional.  

4. Main electrical components adopts schneider and Omron brands, stable and reliable performance.   

5. Equipped with loading and unloading cart, convenience of loading and unloading, enhancing efficiency of production.

Main technical parameters

No.

Model

Working zone

Max. Temperature

Vacuum

Leakin rate

Power

ØXHmm

(℃)

Pa

Pa/h

KW

1

ZT-160-15

600X900

1500

1-100

0.67

160

2

ZT-245-15

800X1200

1500

1-100

0.67

245

3

ZT-300-15

900X1500

1500

1-100

0.67

300

4

ZT-680-15

1500X2500

1500

1-100

0.67

680

5

ZT-900-15

1800X3000

1500

1-100

0.67

900

Furnace can be customized on your request.


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